| |
 |
|
| |
| Surface mapping Fizeau interferometer |
 |
| Product Highlights: |
- Non-contact profiler
- Measures step heights from less than a nanometer (.001 micron, or 10 Angstrom) up to millimeters!
- No stylus
- True three-dimensional measurements
- Faster than stylus profiling, but more repeatable
- Ultra-precise height sensitivity
- Low cost of ownership
|
| |
| Measurement features: |
- 3-D surface mapping
- Quantitative, visual and confocal modes using optical interferometry
- Standard 2D and 3D surface statistics including summit and valley analyses and University of Birmingham specified S-parameters
- Non-contact high precision Surface Profiler
- NIST traceable correlation
|
| |
| Software features: |
- Comprehensive graphical software for the acquisition, analysis, manipulation and visualization of data
- Calculation of surface statistics including summit and valley analysis
- Fourier and autocovariance analysis and surface filtering
- Polynomial fitting, data filtering, scaling, masking and interpolation
- Interactive zoom
- X-Y and line segment profiles
- 3D wire, hybrid and solid plots
- Area difference plot for step height measurement
- Fourier analysis for visualizing and characterizing periodic structures in surface maps
- Stitching of measurements to form a large scale, high-density map
|
| |
| Physical features: |
- Optical microscope with eyepieces and video display of images
- Computer sensing of turret-based objectives allows easy change of magnification
- Autofocus simplifies measurements
- Upgradeable Pentium computer
- Options include motorized stage controller, various objectives, and multiple magnification wheel
- Numerous stage and stage fixture configurations, accommodating nearly any test sample
|
| |
| Non-contact 3D surface profiler |
Measures roughness, finish and texture of surfaces ranging from highly polished optics, wafers and disk media to rough surfaces such as rolled steel and aluminum, paper, plastics, and ceramics. Characterize 3D microstructure such as micro-electronic mechanical systems (MEMs). Optional specialized applications are available, for example analysis of laser texture on hard disk media. |
| Research flexibility, yet speed for process control |
| Once R&D has refined the process, the instrument readily adapts to production process control. A DSP-based video digitizer, optimized software, and the fastest Pentium processor permit throughput rates that are critical on the production floor. |
| Essential information immediately displayed |
Regardless of the application, MicroXAM's software is designed for industrial use. Industry standard statistics are stored in reports or as graphical data. ASCII data files are based on University of Birmingham specified (UDF) format, for statistical surface analysis. Means, averages and standard deviations are calculated, stored, and displayed. Configuration options allow the process engineer to select the essential information for display, while the report retains all of the statistics for review and manipulation by spreadsheet. |
| |
| Applications for this product |
- High data density image stitching
- Laser ablation calibration analysis
- Laser texture analysis
- Micro-machining (MEMS)
|
| |
| Measurement Arrays |
| Image stitching |
| An array of m X n images can be stitched at any magnification to create a large field of view at higher resolution. |
 |
| Stitched image arrays combine adjacent fields of view to provide high-density lateral sampling in surface measurements by MicroXAM, a non-contact three dimensional optical profiler. |
| For large areas, or where high data density or high slope sensitivity is desired, stitching multiple maps into one larger map is a means to accurately extend the capabilities of the objective. Even relatively large fields of view can be measured with reliability. ADE Phase Shift's white light profiler, MicroXAM, can be used to characterize multiple fields of view, with unrivalled resolution in height and increased lateral detail. |
The above image of a U.S. Quarter is a three dimensional hybrid height/solid model plot of a Quarter's surface structure: 22.1 mm wide x 22.1 mm high. The measurement was taken by a tabletop version of the MicroXAM. |
| |
| Laser ablation calibration analysis |
| Surface measurement of microstructure for calibrating lasers |
| Laser focus and power can be calibrated using 3D surface volume measurements by MicroXAM, a non-contact three dimensional optical profiler. |
Micro structures are easily measured, and their displacement and volume can be calculated, by scanning depth and width. 3-dimensional measurements provide data on depth, breadth and width (x,y,z). For large areas, or where high data density or high slope sensitivity is desired stit ching multiple maps into one larger map is a means to accurately extend the capabilities of the objective. Even relatively large fields of view can be measured with reliability. ADE Phase Shift's white light profiler, MicroXAM, can be used to characterize micro-electronic mechanical systems (MEMs) with unrivalled resolution in height and lateral detail. |
| The above image of a laser ablation volume is a three dimensional hybrid height/solid model plot, with the top surface shape removed, or mathematically flattened. The resulting volume can be calculated using MicroXAM's analysis software. The measurement was taken by a tabletop version of the MicroXAM. |
| |
| Laser texture analysis |
| ADE Phase Shift is at the forefront of laser texture analysis for the hard disk industry. MicroXAM optical profiler for laser texture analysis features programmable rotary stage, athermal lenses, automation integration and ID/OD identification -- as well as full production mode software. Above, a three dimensional model of the surface of a hard disk, in the laser-textured landing area for the read head. Laser texture bumps such as these permit the hard drive to spin up to speed without adhering to the head due to 'stiction. |
Mi croXAM is the benchmark instrument for laser texture analysis, used by those who design laser texturing machines, and by their customers, the hard disk manufacturers. Capable of measuring any bump type, every measurement by MicroXAM collects more than 100 different vital statistics, including peak-to-mean, bump density, tracking, rim diameters and so on. Measuring laser texture bumps requires a 3-d profiler like the optical profiler, to properly analyze volume and spacing. |
| Measurements feature excellent accuracy and repeatability. MicroXAM's one button operation is ideal for production environments, enabling data collection for SPC and pass/fail specs for process monitoring. |
| |
| Micro-machining (MEMS) |
Surface measurement of microstructure |
MEMs structures are easily measured u sing special techniques for scanning depth and stitching multiple maps into one larger map. Even relatively large fields of view can be measured with reliability. ADE Phase Shift's white light profiler, MicroXAM, can be used to characterize micro-electronic mechanical systems (MEMs) with unrivalled resolution in height and lateral detail. |
The above image of a MEMS is a three dimensional hybrid height/solid model plot of a MEMS structure: 0.1 mm wide x 0.13mm deep x 8 microns high. The measurement was taken by a tabletop version of the MicroXAM. |
|
Copryright 2006 茂莱(南京)仪器有限公司